
Exnodes is a semiconductor technology company specializing in advanced defect detection for wafer inspection using its patented Computational Parallel Inspection® (CPI) technology. The company offers a breakthrough 8.9 nm sensitivity with visible light, enabling unpatterned wafer inspection without the need for deep ultraviolet (DUV) light, which can cause damage. Exnodes' technology detects defects as small as 20 nm at a throughput of 120 wafers per hour, providing real-time feedback loops suitable for 3 nm node volume manufacturing. Their compact inspection modules integrate onboard cluster tools, and their AI-driven detection, classification, and root cause analysis models enhance process control. Exnodes licenses its technology to leading semiconductor industry players and holds 10 patents, positioning itself as a key enabler for next-generation semiconductor manufacturing processes.

Exnodes is a semiconductor technology company specializing in advanced defect detection for wafer inspection using its patented Computational Parallel Inspection® (CPI) technology. The company offers a breakthrough 8.9 nm sensitivity with visible light, enabling unpatterned wafer inspection without the need for deep ultraviolet (DUV) light, which can cause damage. Exnodes' technology detects defects as small as 20 nm at a throughput of 120 wafers per hour, providing real-time feedback loops suitable for 3 nm node volume manufacturing. Their compact inspection modules integrate onboard cluster tools, and their AI-driven detection, classification, and root cause analysis models enhance process control. Exnodes licenses its technology to leading semiconductor industry players and holds 10 patents, positioning itself as a key enabler for next-generation semiconductor manufacturing processes.
Core tech: Computational Parallel Inspection (CPI) visible-light wafer defect detection
Claimed sensitivity: Detects defects as small as 20 nm
Throughput: Approximately 120 wafers per hour
Founded: 2014
Investors (reported): Samsung Ventures, SK Hynix, plus individual investors
Wafer inspection and semiconductor process control (defect detection for advanced node manufacturing).
2014
DeepTech
Reported seed round with individual investors also named (Nick Conley, Gordon Eubanks, Joseph Goodman).
“Backed by semiconductor corporate VCs (Samsung Ventures, SK Hynix) and experienced individual investors”